ULVAC, Inc.
401 Griffin Brook Drive
Methuen, MA 01844 USA
phone: 1-978-686-7550
sales@us.ulvac.com
www.ulvac.com

Booth 17

ULVAC is an international corporation that designs and manufactures systems for industrial and research applications of vacuum technology. Our products cover a broad spectrum of markets, including specific systems designed for the MEMS industry. These include: metals/Piezo-electric materials etch, DRIE etch, Ashing systems and a broad portfolio of Sputtering systems.