MicroMagFab proposes a technology to integrate high performance NdFeB permanent magnets into microsystems. High rate sputtering is used to deposit thick (10 - 50 microns) NdFeB films. Clean room techniques (lithography, DRIE, polishing) are exploited to define the final size and shape of the high performance micro magnets.
Benefits: Fully integrated, Customized shapes and sizes, Batch fabrication, Resource efficient
Applications: µ-actuators, µ-generators (energy harvesters), µ-motors, µ-sensors
Project sponsored by: Linksium