Institut Néel/CNRS MicroMagFab Project
25 rue des Martyrs BP 166
Grenoble, 38042 FRANCE
phone: +33-687-962-982
georgiana.groza@neel.cnrs.fr
www.neel.cnrs.fr

Table-top

MicroMagFab proposes a technology to integrate high performance NdFeB permanent magnets into microsystems. High rate sputtering is used to deposit thick (10 - 50 microns) NdFeB films. Clean room techniques (lithography, DRIE, polishing) are exploited to define the final size and shape of the high performance micro magnets.

Benefits: Fully integrated, Customized shapes and sizes, Batch fabrication, Resource efficient

Applications: µ-actuators, µ-generators (energy harvesters), µ-motors, µ-sensors

Project sponsored by: Linksium.