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SmarAct GmbH
Oldenburg, 26135 GERMANY
phone: +49-441 - 800-8790

SmarAct Metrology develops high-performance metrological tools for both industry and academia. The product portfolio from miniaturized interferometers with picometer resolution to confocal infrared vibrometers is completed by nanoprobing systems for the electrical measurement of even the smallest technology nodes. We serve high accuracy metrology applications within fields such as positioning, semiconductors, microscopy and MEMS. Moreover, we offer measurement services that allow you to get a first impression and benefit from our expertise.

PicoScale Vibrometer

Imaging MEMS through silicon


Nanoprobing 14nm transistors using the SmarProbe