Sponsors » Current Support

ASML Japan Co., Ltd.
Gotenyama Trust Tower Bldg. 4F,4-7-35 Kita Shinagawa
Tokyo, Shinagawa-ku 140-0001 JAPAN
phone: +81-3-5793-1800

ASML is a leading supplier to the semiconductor industry. ASML provides chipmakers with hardware, software and services to mass produce the patterns of integrated circuits (microchips).

We continue to innovate in productivity, cost of ownership and performance across our TWINSCAN XT product lines (ArF, KrF and i-line), for both 200 mm and 300 mm wafer sizes.

Mature Products and Services (MPS) is a separate business line in ASML, dedicated to the mature installed base and market. MPS offers Steppers and Scanners specification such as:
- Wavelength: 365 to 193 nm
- Resolution: 400 to 90 nm
- Overlay: 100 to 12 nm
- Wafer size: 3 to 8 inch

Boosting Capacity of 200 mm Fabs through Scanner Retrofitting

MEMS_Imaging with PAS5500

PAS5500 Systems Brochure

Thick Resist Imaging with PAS5500