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SUSS MicroTec Solutions GmbH & Co. KG
Schleissheimer Str. 90
Garching, 85748 GERMANY
Phone: +49-89-320-070
info@suss.com
www.suss.com

Booth 20

SUSS MicroTec is a leading manufacturer of system and process solutions for micro patterning in the semiconductor industry and related markets. In close collaboration with research institutes and industry partners, SUSS MicroTec drives the development of next-generation technologies such as 3D integration and nanoimprint lithography as well as key processes for MEMS and LED production. With its global infrastructure for applications and service, SUSS MicroTec supports more than 8,000 installed systems worldwide.