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Reflecting the rapid growth of the MEMS field and the commitment and success of its research community, the IEEE MEMS Conference series has evolved into a premier annual event in the MEMS area. In recent years it has attracted over 600 participants and has presented more than 200 select papers in non-overlapping oral and poster sessions. The 36th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2023) is one of the premier annual events reporting research results on every aspect of Microsystems technology. This Conference reflects from the rapid proliferation of the commitment and success of the Microsystems research community. In recent years, the IEEE MEMS Conference has attracted more than 700 participants, 800+ abstract submissions and has created the forum to present over 200 select papers in podium and poster/oral sessions. Its single-session format provides ample opportunity for interaction between attendees, presenters and exhibitors. IEEE MEMS 2023 will be held in Munich, GERMANY, from 15 - 19 January 2023. The major areas of activity in the development of MEMS solicited and expected at this conference include but are not limited to:
- Design, simulation and analysis tools with experimental verification
- Fabrication technologies and processes
- Silicon and non-silicon materials
- Electro-mechanical integration techniques
- Assembly and packaging approaches
- Metrology and operational evaluation techniques
- System architecture
- Mechanical, thermal, and magnetic sensors and actuators, and system
- Opto-mechanical microdevices and microsystems
- Fluidic microcomponents and microsystems
- Microdevices for data storage
- Microdevices for biomedical engineering
- Micro chemical analysis systems
- Microdevices and systems for wireless communication
- Microdevices for power supply and energy harvesting
- Nano-electro-mechanical devices and systems
- Scientific microinstruments