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SmarAct Metrology GmbH & Co. KG
Oldenburg, 26135 GERMANY
phone: +49-4418008-424

Booth 18

SmarAct Metrology presents its turnkey solution to measure vibrations of micromechanical structures with sizes that range from just a few Ám to multiple cm. With a very compact measurement head, vibrations at different planes and even through silicon enclosures can be measured in situ and in combination with a nanoprober inside an electron microscope.