memsstar is a leading process and equipment supplier of etch and deposition solutions for semiconductor and MEMS manufacturing processes.

Offering in-depth process expertise and a range of new and remanufactured etch and deposition equipment, memsstar provides a full complement of processes and related services for multiple applications from R&D through to high-volume manufacturing. We are market leaders in single-wafer dry release etching using vapor HF and XeF2 chemistries and surface modification (SAM coating) processes.