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Booth # Exhibitor Booth # Exhibitor 1 Polytec France SAS 14 Xactix, Inc. 2 Polytec France SAS 15 OAI 3 Sensirion AB 16 Zurich Instruments AG 4 Journal of Micromech. and Microengr. 17 Si-Ware Systems - Egypt 5 IntelliSense 18 Cambridge NanoTech 6 MicroChem Corp. 19 SPTS Technologies 7 Tousimis 20 Novio MEMS BV 8 AMMT GmbH 21 Nano-Tera.ch 9 RENATECH network 22 Oxford Instruments Plasma Technology 10 Coventor Inc. 23 SAES Getters 11 Micronarc 24 Inst. of Engineering and Technology 12 Micronarc 25 MicroTEC Südwest Spitzencluster 13 Micronarc TT Cambridge University Press TT IEEE MEMS 2013 Conference TT DJ DevCorp TT innodys TT memsstar TT SoftMEMS Eurl TT CST

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