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Oxford Instruments Plasma Technology North End, Yatton Bristol, B5494 UK phone: +44-1934-837-000 fax: +44-1934-837-007 email: plasma@oxinst.com www.oxford-instruments.com Booth 22 Our systems provide process solutions for the micro- and nanometre engineering of materials for semiconductor, optoelectronics, HBLED, MEMS & microfluidics, high quality optical coating and many other applications in micro- and nanotechnology. |