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Oxford Instruments Plasma Technology
North End, Yatton
Bristol, B5494 UK
phone: +44-1934-837-000
fax: +44-1934-837-007
email: plasma@oxinst.com
www.oxford-instruments.com

Booth 22

Oxford Instruments offers flexible, configurable process tools and leading-edge processes for the precise, controllable and repeatable etching, deposition and growth of micro- and nano-structures.

Our systems provide process solutions for the micro- and nanometre engineering of materials for semiconductor, optoelectronics, HBLED, MEMS & microfluidics, high quality optical coating and many other applications in micro- and nanotechnology.


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