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SAES Getters
Viale Italia, 77
Lainate (Milian), 20020 ITALY
phone: +39-2-93178-489
fax: +39-2-93178-320
email: page@saes-group.com
www.saesgetters.com

Booth 23

SAES getters provide solutions for vacuum wafer level packaging of MEMS. Leveraging the consolidated experience in vacuum technology SAES has recently developed a getter film capable to maintain stable operative conditions for the entire MEMS lifetime. PageWafer can be integrated in the packaging of several type of MEMS : accelerometers, gyros, resonators, IR-microbolometers, pressure sensors and RF switches.


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