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Reflecting the rapid growth of the MEMS field and the commitment and success of its research community, the IEEE MEMS Conference series has evolved into a premier annual event in the MEMS area. In recent years it has attracted over 600 participants and has presented more than 200 select papers in non-overlapping oral and poster sessions. The 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008) will be held in Tucson, Arizona, USA, from January 13 - 17, 2008. The major areas of activity in the development of MEMS solicited and expected at this conference include but are not limited to:
  • Design, simulation and analysis tools with experimental verification
  • Fabrication technologies and processes
  • Silicon and non-silicon materials
  • Electro-mechanical integration techniques
  • Assembly and packaging approaches
  • Metrology and operational evaluation techniques
  • System architecture
The major areas of activity in the application of MEMS solicited and expected at this conference include but are not limited to:
  • Mechanical, thermal, and magnetic sensors and actuators, and system
  • Opto-mechanical microdevices and microsystems
  • Fluidic microcomponents and microsystems
  • Microdevices for data storage
  • Microdevices for biomedical engineering
  • Micro chemical analysis systems
  • Microdevices and systems for wireless communication
  • Microdevices for power supply and energy harvesting
  • Nano-electro-mechanical devices and systems
  • Scientific microinstruments
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