Reflecting the rapid growth of the MEMS field and the commitment and success of its research community, the IEEE MEMS Conference series has evolved into a premier annual event in the MEMS area. In recent years it has attracted over 600 participants and has presented more than 200 select papers in non-overlapping oral and poster sessions. The 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008) will be held in Tucson, Arizona, USA, from January 13 - 17, 2008. The major areas of activity in the development of MEMS solicited and expected at this conference include but are not limited to:
Design, simulation and analysis tools with experimental verification
Fabrication technologies and processes
Silicon and non-silicon materials
Electro-mechanical integration techniques
Assembly and packaging approaches
Metrology and operational evaluation techniques
System architecture
The major areas of activity in the application of MEMS solicited and expected at this conference include but are not limited to:
Mechanical, thermal, and magnetic sensors and actuators, and system
Opto-mechanical microdevices and microsystems
Fluidic microcomponents and microsystems
Microdevices for data storage
Microdevices for biomedical engineering
Micro chemical analysis systems
Microdevices and systems for wireless communication
Microdevices for power supply and energy harvesting
Nano-electro-mechanical devices and systems
Scientific microinstruments
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