Heidelberg Instruments, Inc.
500 West Cummings Park, Suite 4950
Woburn, MA 01801 USA
Heidelberg Instruments is a world leader in the production of high-precision direct write lithography systems and maskless aligners. Due to their flexibility, these systems are used in research, development and industrial applications for direct writing and photomask production by some of the most prestigious universities and industry leaders in the areas of MEMS, BioMEMS, nano technology, ASICS, TFT, plasma displays, micro optics, and many other related applications.