We offer flexible process tools and leading-edge processes for the precise, controllable, repeatable etching, deposition and growth of micro- and nano-structures. Systems provide process solutions for the micro- and nanometre engineering of materials for MEMS, semiconductor, optoelectronics, HBLED, PV & microfluidics, high quality optical coating and many applications in micro- and nanotechnology.
- Plasma Etch & Deposition
- Atomic Layer Deposition (ALD)
- Ion Beam Etch & Deposition
- Deep Silicon Etch