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Oxford Instruments
North End, Yatton
Bristol, B5494AP UK
phone: +44-1934-837-000
fax: +44-1934-837-001

Booth 21

We offer flexible process tools and leading-edge processes for the precise, controllable, repeatable etching, deposition and growth of micro- and nano-structures. Systems provide process solutions for the micro- and nanometre engineering of materials for MEMS, semiconductor, optoelectronics, HBLED, PV & microfluidics, high quality optical coating and many applications in micro- and nanotechnology. Core technologies:
  • Plasma Etch & Deposition
  • Atomic Layer Deposition (ALD)
  • Ion Beam Etch & Deposition
  • Deep Silicon Etch

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