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OAI provides advanced precision equipment for MEMS, BioMEMS , and Semiconductor Industries. Products for R&D include Model 200 IR Mask Aligners and Model 800 Backside Mask Aligners with new optional image capture and auto Z & auto edge effect leveling. For production, the Model 8000 Mask Aligner has newly engineered front to backside alignment and user interface. For BioMEMS, UV Light Sources with superior uniformity and performance are available.