MEMS 2015 PortugalWelcomeGeneral InfoProgramAuthors / AbstractsSponsors / ExhibitsRegistrationAbout EstorilContact

Muegge GmbH
Hochstrasse 4-6
Reichelsheim, 64385 GERMANY
phone: +49-6164-93070
fax: +49-6164-930793

Booth 23

MUEGGE is solution provider in the field of industrial heating and plasma technology, thinking in systems as well as in components. MUEGGE's STP2020 tool based on the Remote Plasma Source generating high amount of rapid reactive radicals shows extremely high etching rates of e.g. SU-8 resist with high selectivity at extremely low thermal load for production of MEMS in the LiGA process.

Copyright 2014, All Rights Reserved, MEMS 2015 and