Fabrication and Packaging Technologies
Etching and deposition processes; 3-D fabrication; bonding; process integration; surface modification; batch packaging; micro assembly; self assembly.
Materials and Device Characterization
New materials; known materials under new operating conditions; measurement of material properties; calibration and compensation; failure analysis; degradation mechanisms and drift; reliability.
Biomedical and Chemical Micro Sensors and Systems
Micro-total-analysis systems; implantable devices; drug delivery; micro-PCR systems; chemical and biochemical sensors and systems.
Mechanical and Physical Sensors and Systems
Sensors and systems for inertial forces (accelerometers, gyroscopes, shock sensors), pressure, force, stress; resonant sensors and systems; electromagnetic (non-optical) sensors and systems; acoustic sensors and systems; thermal devices and systems.
Design, Simulation, and Theoretical Concepts with Experimental Verification
Synthesis and analysis methods; design techniques for devices and systems; CAD tools; modeling approaches with experimental verification; theoretical concepts in sensing; actuation and system integration.
Micro-Fluidic Components and Systems
Microchannel gas and liquid flows; electrokinetics; mixing; two-phase flows; suspension flows, droplet and bubble dynamics; flow separation and vortex dynamics.
Micro-Actuators
Pumps and valves; springs and grippers; motors; beam and membrane actuators; MEMS-based robotics.
Optical and RF MEMS
Mirrors; optical sensors; wave-guides; filters; antennas; inductors and varactors; phase shifters; switches; optical and RF MEMS based systems.
Energy and Power MEMS
Miniaturized fuel cells; power generators; microturbines; thrusters.
Nano-Electro-Mechanical Devices and Systems
Carbon-nanotubes; molecular machinery; nanoelectronic devices with sensing applications; connection of nanoscale devices to the micro and macro world.
Miscellaneous
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