Heidelberg Instruments Inc.
2807 Oregon Court, Unit E2
Torrance, CA 90503 USA
phone: 1-310-212-5071
fax: 1-310-212-5254 www.heidelberg-instruments.com
Booth 1
Heidelberg Instruments is a world leader in design, development and manufacturing of laser lithography systems for direct write and photomask applications. Heidelberg Systems are used in world leading MEMS design and development at elite research facilities across the globe. Heidelberg Systems find wide application in MEMS, MOEMS, Integrated Circuits, Micro-Optics, Microfluidics and many others areas requiring precise 2D and 3D microstructures. This year we introduce the upg101, an economical table-top system designed for rapid prototyping of complex microstructures required by MEMS and many other applications.
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