Frontier Semiconductor
199 River Oaks Parkway
San Jose, CA 95134 USA
phone: 1-408-432-8838
fax: 1-408-432-8830 www.frontiersemi.com
Booth 3
FSM designs and manufactures metrology tools for the semiconductor and MEMS industries. We are launching a laser-based stress gauge for measuring ultra low film stress with high repeatability and reproducibility for the critical MEMS applications. We also have a non-contact trench depth measurement tool that can measure micron size openings.
Copyright 2007, All Rights Reserved, MEMS2008 and interteq.com
