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Exhibition Current Commercial Support Exhibit Hall Floorplan Exhibition Schedule Past Commercial Support Exhibition Contract Industrial Support Contract |
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 Xactix, Inc. 2403 Sidney Street, Suite 265 Pittsburgh, PA 15203 USA tel: 412-381-3195 fax: 412-381-1136 www.xactix.com XACTIX is the manufacturer of the Xetch® xenon difluoride (XeF2) etching systems, the X3 Seriesú for commercial customers and the e1 Seriesú for university customers. These dry isotropic etching tools are popular in the MEMS community due to high selectivity to silicon versus many standard films including photoresist, silicon dioxide, silicon nitride, and aluminum. The Xetch® systems are particularly well suited for release, but are certainly not limited to MEMS applications and are useful for many applications where highly selective isotropic silicon etching is required. Booth# 17  |
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