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General Info
Organizing Committees
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Reflecting the rapid growth of the MEMS field and the commitment and success of its research community, the IEEE MEMS Conference series has evolved into a premier annual event in the MEMS area. In recent years it has attracted over 600 participants and has presented 120-150 select papers in non-overlapping oral and poster sessions. Despite its size, it has remained committed to a single-session format, thus favoring the strong interaction of attendees among each other and with exhibitors.
The major areas of activity in the development of MEMS solicited and expected at this conference include but are not limited to
- Design, simulation and analysis tools with experimental verification
- Fabrication technologies and processes
- Materials
- Electro-mechanical integration techniques
- Assembly and packaging approaches
- Metrology and operational evaluation techniques
- System architecture
The major areas of activity in the application of MEMS solicited and expected at this conference include but are not limited to
- Mechanical, thermal, and magnetic sensors and actuators, and systems
- Opto-mechanical microdevices and microsystems
- Fluidic microcomponents and microsystems
- Microdevices for data storage
- Scientific microinstruments
- Microdevices for biomedical engineering
- Micro chemical analysis systems
- Microdevices and systems for wireless communication
- Nano-electro-mechanical devices and systems
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