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Exhibition Current Commercial Support Exhibit Hall Floorplan Exhibition Schedule Past Commercial Support Exhibition Contract Industrial Support Contract |
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 Trikon Technologies, Inc. Ringland Way Newport, NP18 2TA SOUTH WALES tel: 44-16-334-000 fax: 44-16-334-141-41 www.trikon.com Trikon Technologies manufactures and supplies Etch, CVD and PVD equipment for semiconductor and related industries. Trikon will exhibit its deep silicon etch process module (DSi) that is used for a variety of MEMS building blocks - applications include high rate etches, high aspect ratio trenches/vias and etches for SOI wafers. The DSi module is available on an in-line production platform (Omega i2L) or a multi-chamber cluster tool (Omega fxP). Development or prototyping can be carried out using a semi-automated wafer loader (Omega r4P). Other etch modules (PERIE, ICP, M0RI & GPE) support related etches such as dielectrics, metals, organics and isotropic release. Booth# 2  |
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