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Exhibition Current Commercial Support Exhibit Hall Floorplan Exhibition Schedule Past Commercial Support Exhibition Contract Industrial Support Contract |
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 Surface Technology Systems PLC Imperial Park Imperial Way Newport, GWENT NP10 8UJ U.K. tel: 44-1633-652-400 fax: 44-1633-652-403 www.stsystems.com Established in 1984, STS is a leading supplier of cassette-to-cassette cluster and single/batch loadlocked plasma etch and deposition systems that can be configured with ICP, RIE, XeF2 and CVD sources. Products include the market-leading ASEĻ deep silicon etch process for MEMS micromachining. The company also offers a complete suite of other enabling process technologies for MEMS device fabrication and packaging applications, including dielectric etch and deposition, metal etch and dry, isotropic silicon etch. Serving both R&D and high volume manufacturers, STS is committed to facilitating the transfer of MEMS technology from R&D to full scale production and successful commercialization. Booth# 5  |
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