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 Primaxx Inc. 7377 William Avenue #800 Allentown, PA 18106 USA tel: 1-610-336-0314 fax: 1-610-336-0455 www.primaxxinc.com Primaxx is the world leader in reduced pressure, residue-free MEMS dry etch release, a critical buried oxide etch step which "releases" the moving components of challenging MEMS device designs. Combining anhydrous HF gas and alcohol vapor at reduced pressure provides a wide, stable process window that can address different oxide compositions and thicknesses while maintaining high selectivity to other common materials found in MEMS designs including aluminum. The Primaxx process also eliminates stiction, a yield-killing phenomenon which can bind the moving components of MEMS devices when released with conventional wet processing technology. Primaxx, Inc. designs, manufactures, and markets processing equipment for MEMS and semiconductors, and offers the broadest range of MEMS dry etch release products, from lab systems to multi-chambered cluster tools for high volume production. Headquartered in Allentown, Pennsylvania, Primaxx maintains sales and support centers in the United States, Europe and Asia, as well as two process development labs in Pennsylvania and one in Japan. For more information, please visit the company's website at www.primaxxinc.com. Primaxx is a registered trademark of Primaxx, Inc. Booth# 4  |
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