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Exhibition Current Commercial Support Exhibit Hall Floorplan Exhibition Schedule Past Commercial Support Exhibition Contract Industrial Support Contract |
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 Lam Research Corporation 4650 Cushing Parkway Fremont, CA 94538 tel: 1-510-572-3545 fax: 1-510-572-8523 www.lamrc.com Based on Lam Research Corporation's market-leading TCP® 9400 Series of silicon etch systems, the TCP® 9400DSiETM provides production-worthy technology with the broad application flexibility required for MEMS applications. The high system reliability is a result of extensive product learning from an installed base exceeding 1,500 TCP process chambers worldwide. Lam's patented TCP technology provides a broad process window that enables etching a wide range of structures. The TCP 9400DSiE is available in an affordable package and backed by the extensive global support capabilities and etch expertise of the semiconductor industry's number one etch equipment supplier. Booth# 13  |
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