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Engis

Engis Corporation
105 W Hintz Road
Wheeling, IL 60050 USA
tel: 847-808-3400
fax: 847-808-9430
www.engismicrotech.com

Engis Corporation, a leading manufacturer of superabrasive finishing systems, provides diamond based consumables, machines and processes developed for lapping and polishing MEMS devices which demand sub-micron levels of precision. By means of products designed for controlled and efficient material removal and polishing processes, smearing, dishing and other defects that can degrade device performance and lower yields are minimized. Our Microtech-Finishing Lab provides a resource to small and start-up organizations for responsive and affordable process development and pilot production wafer/device polishing services. Engis also actively seeks to cooperate and partner with leading universities and research centers which are engaged in challenging and emerging applications with requirements for surface micro-machining.

Booth# 44

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