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Exhibition Current Commercial Support Exhibit Hall Floorplan Exhibition Schedule Past Commercial Support Exhibition Contract Industrial Support Contract |
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 Advanced Modular Sputtering, Inc. 93 S. La Patera Goleta, CA 93117, USA tel: 1-805-692-0913 fax: 1-805-692-0903 www.amsincorp.com High volume production proven AMS cluster sputtering equipment is ideal for reactive deposition of high quality, highly uniform piezoelectric aluminum nitride (AlN) and other compounds used in BAW/ FBAR, MEMS and bio-MEMS devices. The AMS 2003 is a very compact (<26ft2)), 4" to 8" capable sputtering tool ergonomically designed for ease of use and service. A sputter-up configuration utilizes a dual-ring target arrangement that enables excellent reactive deposition wafer-to-wafer film properties. A single module tools for R&D is offered. AMS offers development foundry service for AlN and electrodes. Booth# 39  |
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