Sponsors » Current Support

Ulvac Technologies
401 Griffin Brook Drive
Methuen, MA 01844 USA
phone: +1-978-620-7550

Booth 4

ULVAC applies vacuum technologies in manufacturing technology of advanced Piezoelectric and optical MEMS, RF Filters, Sensors by applying state-of-the-art dry etching, sputtering, evaporation, and ashing equipment; and peripheral vacuum related metrology and components. ULVAC supports development of many devices and applications including 5G/6G, optoelectronic, p-GaN, n-GaN, photonics integrated circuits (PICs) on Si, SiC, GaAs, Glass, Lithium Niobate, LiTaOx wafers.