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Materials, Fabrication, and Packaging for Generic MEMS and NEMS
1.01 Materials for MEMS and NEMS
1.02 Generic MEMS and NEMS Manufacturing
1.03 Digital Micromanufacturing (Laser Micromachining, Additive Manufacturing)
1.04 Packaging and Assembly
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Micro- and Nanofluidics
2.01 Materials for Micro- and Nanofluidics
2.02 Manufacturing for Micro- and Nanofluidics
2.03 Generic Microfluidics and Nanofluidics
2.04 Biological and Medical Microfluidics and Nanofluidics
2.05 Integrated/Embedded Microfluidic and Nanofluidic Systems & Platforms
2.06 Other Micro- and Nanofluidics
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Bio and Medical MEMS
3.01 Materials for Bio- and Medical MEMS
3.02 Manufacturing for Bio- and Medical MEMS
3.03 Nanobiotechnology
3.04 Biosensors and Bioreactors
3.05 Tissue Engineering
3.06 Medical Microsystems (Probes, Implantables, Imaging, Etc.)
3.07 Other Bio and Medical MEMS
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MEMS Physical Sensors
4.01 Materials for Physical Sensors
4.02 Manufacturing for Physical Sensors
4.03 Nanoscale Physical Sensors
4.04 Inertial Sensors (Gyros, Accelerometers, Resonators, Etc.)
4.05 Fluidic Sensors (Flow, Pressure, Density, Viscosity, Etc.)
4.06 Sonic and Ultrasonic Transducers (Microphones, PMUTs, Etc.)
4.07 Gas and Chemical Sensors
4.08 Force and Displacement Sensors (Tactile, Force, Torque, Stress and Strain Sensor)
4.09 Other Physical Sensors
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MEMS for Electromagnetics
5.01 Material for Electromagnetic Transducers
5.02 Manufacturing for Electromagnetic Transducers
5.03 NEMS for Electromagnetic Transducers
5.04 DC and Low Frequency Magnetic and Electromechanical Components and Systems
5.05 RF MEMS Components and Systems
5.06 MEMS for Timing and Frequency Control
5.07 THz MEMS Components and Systems
5.08 Phototonic Components and Systems
5.09 Free Space Optical Components and Systems (Displays. Lenses, Detectors)
5.10 Other Electromagnetic MEMS
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MEMS Actuators and PowerMEMS
6.01 Materials for Actuators and PowerMEMS
6.02 Manufacturing for Actuators and PowerMEMS
6.03 Nanoscale for Actuators and PowerMEMS
6.04 Actuator Components and Systems
6.05 PowerMEMS Components and Systems
6.06 Other Actuators and PowerMEMS
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Technical Topics on MEMS Products
7.01 Methods of Product Comparison
7.02 Measurement Methods for Products Specs
7.03 MEMS vs. Macro: Pros and Cons of Miniaturization in Actual Products
7.04 Barriers to Commercialization & Research Needs for Future Products
7.05 Fabrication Models for Products
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