MEMS 2017WelcomeGeneral InfoProgramAuthors / AbstractsSponsors / ExhibitsRegistrationAbout Las VegasContact

685 River Oaks Parkway
San Jose, CA 95134 USA
phone: 1-408-232-0600
fax: 1-408-433-9904

Booth 29

OAI manufactures precision lithography equipment for MEMS, Microfluidics and Nanotechnology. Products include table-top mask aligners, UV Light Sources, front/backside optical 4 camera Mask Aligners with advanced beam optics, and fully automated backside Mask Aligners for production. We are featuring the newly upgraded Model 800 Mask Aligner which is totally PC enhanced, has ergonomic improvements, and options for low volume production: auto-align, motorized stages and 3 point wedge- effect leveling.

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