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XACTIX
2403 Sidney Street, Suite 300
Pittsburgh, PA 15203 USA
phone: 1-412-381-1136
fax: 1-412-381-1136
email: ussales@xactix.com
www.xactix.com

Booth 7

XACTIX manufactures dry, highly selective isotropic etching systems (using XeF2) for etching Si, Ge, Mo and SiGe. They can also be used to selectively etch Ti, Ta, W, TiN and TaN. Popular applications for these systems are releasing and under cutting MEMS or NEMS, Failure Analysis, and removal of seed or barrier layers


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