Exhibition


Exhibitor Brochure

Benefactor Brochure

Current Commercial Support

Booth Availability

Exhibition Schedule



<< Back



Oxford Instruments Plasma Technology
Northend, Yatton
Bristol, BS49 4AP AP UK
phone: +44-1934-837-000
fax: +44-1934-837-001
email: plasma@oxinst.com
www.oxford-instruments.com

Booth 14

Oxford Instruments Plasma Technology offers flexible, configurable process tools and leading-edge processes for the precise, controllable and repeatable etching, deposition and growth of micro- and nano-structures.

Our systems provide process solutions for the micro- and nanometre engineering of materials for semiconductor, optoelectronics, MEMS & microfluidics, high quality optical coating, HBLED, Photovoltaics and many other applications in micro- and nanotechnology.

These solutions are based on core technologies in:
  • plasma enhanced deposition and etch
  • atomic layer deposition (ALD)
  • ion beam etch and deposition
  • nanoscale growth systems
  • hydride vapour phase epitaxy (HVPE)
Products range from compact stand-alone systems for R&D, through batch tools and up to clustered cassette-to-cassette platforms for high-throughput production processing.

Oxford Instruments is committed to supporting our customers' success, and recognise that this requires world-class products, complemented by world-class service and support.

Oxford Instruments aims to pursue responsible development and deeper understanding of our world through science and technology, and provide high technology tools and systems for industrial and research markets, based on our ability to analyse and manipulate matter at the smallest scale.

www.oxford-instruments.com/plasma


Copyright 2010, All Rights Reserved, MEMS 2011 and interteq.com