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Tokyo Electron Ltd.
5-3-1 Akasaka Biz Tower Akasaka Minatoku
Tokyo, 107-6325 JAPAN
phone: +81-3-5561-7205
fax: +81-3-5561-7413
www.tel.com
Booth 10
Tokyo Electron Limited (TEL) has announced Wafer-Level MEMS Tester TEMEON™-C for Capacitive MEMS devices. TEMEON™-C uses TEL patented technologies to eliminate the parasitic capacitance in order to measure fF (femto Farad) levels of static capacitance accurately and stably at the wafer level within any test environment. In addition to static capacitance measurements, TEMEON™-C also directly measures dynamic capacitance and the displacements of MEMS structures, returning Resonant Frequency and Q-values with pass/fail results.
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