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Surface Technology Systems
Imperial Park
Newport, Gwent, NP108UJ UK
phone: +44-1-6336-5240-0
fax: +44-1633-6524-05
www.stsystems.com
Booth 2
STS is a leading supplier of plasma etch and deposition equipment to the MEMS and Advanced Packaging industries. STS' equipment is used in many high volume production facilities and academic/industrial R&D laboratories. Their portfolio of MEMS process solutions includes the award-winning Advanced Silicon Etch (ASE®) process, the result of over 10 years development of the "Bosch" or deep reactive ion etch (DRIE) process for anisotropic silicon etching. STS also provides process solutions for deep, high rate oxide etch, PECVD of thin films and vapor etching for MEMS release.
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