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OAI
685 River Oaks Parkway
San Jose, CA 95134 USA
phone: 1-408-232-0600
fax: 1-408-433-9904
www.oainet.com
Booth 29
OAI designs and manufactures equipment for MEMS, Nanotechnology and Microfluidics. Products include front and backside mask aligners, stand alone UV lightsources, Nano Imprint System (NIL), and UV Ozone Surface treatment and modification tools. OAI produces mask aligners that are used in both R&D through production. Also available are modules and materials for the Contact Liquid Polymer Process (CliPP) including non-fluorescing liquid photopolymers for printing hydrophobic and hydrophilic surfaces for microfluidic device production. Engineering and service support is maintained worldwide.
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