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Ulvac Technologies
401 Griffin Brook Drive
Methuen, MA 01844 USA
phone: 1-978-686-7550
fax: 1-978-689-6301
email: lfox@us.ulvac.com
www.ulvac.com
Booth 14
ULVAC is an international corporation that designs and manufactures systems, equipment, and materials for industrial and research applications of vacuum technology. ULVAC systems products cover a broad spectrum of markets, with equipment for the MEMS Industry: DRIE equipment for Si, oxides, metals and glasses and a plasma ashing system for the removal of difficult resists and organic sacrificial layers.
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