IEEE MEMS 2014 Conference -- January 26-30, 2014 -- San Francisco, USA

Exhibition

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Oxford Instruments Plasma Technology
300 Baker Avenue, Suite #150
Concord, MA 01742 USA
phone: 1-978-369-9933
fax: 1-978-369-8287
email: plasma@oxinst.com
www.oxford-instruments.com

Booth 32

Oxford Instruments offers flexible process tools and leading-edge processes for the precise, controllable, repeatable etching, deposition and growth of micro- and nano-structures. Systems provide process solutions for the micro- and nanometre engineering of materials for MEMS, semiconductor, optoelectronics, HBLED, PV & microfluidics, high quality optical coating and many applications in micro- and nanotechnology.