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OAI
685 River Oaks Parkway
San Jose, CA 95134 USA
phone: 1-408-232-0600
fax: 1-408-433-9904
email: sales@oainet.com
www.oainet.com

Booth 25

OAI, a manufacturer of precision UV Exposure Systems for over 35 years, presents equipment for prototyping to production of MEMS and Microfluidic Devices. These products include: Table Top Mask Aligners, UV Light Sources, Optical Front/Backside Mask Aligners, and for production fully Automated Mask Aligners. OAI also offers Maskless Laser Direct Write Lithography Systems and Photolithographic Resins developed in France by Kloe, AML Wafer Bonders, and HF Vapor Phase Ethers and IR Microscopes developed in Switzerland by Idonus.



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