MEMS 2006 Istanbul

Surface Technology Systems PLC
Imperial Park Imperial Way
Newport, GWENT NP10 8UJ
Phone: 44-1633-6524-00
Fax: 44-1633-6524-05
Website: www.stsystems.com

Established in 1984, STS is a leading supplier of cassette-to-cassette cluster and single/batch loadlocked plasma etch and deposition systems that can be configured with ICP, RIE, XeF2 and CV D sources. Products include the market-leading ASE® deep silicon etch process for MEMS micromachining. The company also offers a complete suite of other enabling process technologies for MEMS device fabrication and packaging applications, including dielectric etch and deposition, metal etch and dry isotropic silicon etch. Serving both R&D and high volume manufacturers, STS is committed to facilitating the transfer of MEMS technology from R&D to full scale production and successful commercialization.

Booth 5




	Invitation Letter - Current Support - Past Support - Exhibit Hall Floorplan - Exhibition Schedule - Contracts Surface Technology Systems PLC Imperial Park Imperial Way Newport, GWENT NP10 8UJ Phone: 44-1633-6524-00 Fax: 44-1633-6524-05 Website: www.stsystems.com Established in 1984, STS is a leading supplier of cassette-to-cassette cluster and single/batch loadlocked plasma etch and deposition systems that can be configured with ICP, RIE, XeF2 and CV D sources. Products include the market-leading ASE® deep silicon etch process for MEMS micromachining. The company also offers a complete suite of other enabling process technologies for MEMS device fabrication and packaging applications, including dielectric etch and deposition, metal etch and dry isotropic silicon etch. Serving both R&D and high volume manufacturers, STS is committed to facilitating the transfer of MEMS technology from R&D to full scale production and successful commercialization. Booth 5

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