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Aviza Technology Ringland Way Newport, SOUTH WALES NP18 2TA UK Phone: 44-1633-414000 Fax: 44-1633-414141 Website: www.avizatechnology.com Booth 47 Aviza Technology was formed through the merger of Aviza Technology Inc and Trikon Technologies Inc in December 2005. Aviza offers process applications including Atomic Layer Deposition (ALD), diffusion and low pressure chemical vapor deposition (LPCVD) furnaces, atmospheric pressure CVD (APCVD), DCVD, etch and physical vapor deposition (PVD). ÊAt MEMS 2006, Aviza will be exhibiting its MEMS deep Silicon etch processes on the Omega dry etch system, and its thin film deposition solutions by PVD for Bulk Acoustic Wave resonators on the Sigma fxP cluster system. |
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