IEEE MEMS 2014 Conference -- January 26-30, 2014 -- San Francisco, USA

Exhibition

Current Support

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Exhibition Schedule

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SPTS Technologies
Ringland Way
Newport, NP18 2TA UK
phone: +44-163-341-4000
fax: +44-163-341-4141
email: enquiries@spts.com
www.spts.com

Booth 21

SPTS Technologies designs, manufactures, sells, and supports etch, PVD, CVD and thermal capital equipment and process technologies for the global semiconductor and micro-device industries, with focus on the MEMS, advanced packaging, high speed RF device, power management and LED markets. Solutions offered by SPTS include market-leading silicon etch, dielectric etch, dry-release etch, PVD, PECVD, APCVD and large batch vertical furnaces, applicable to R&D, pilot production, or volume production environments. Service and spare parts support are offered through a worldwide network of service centres.