OAI
685 River Oaks Parkway
San Jose, CA 95134 USA
phone: 1-408-232-0600
fax: 1-408-433-9904 www.oainet.com
Booth 46
With 30 years experience as manufacturers of precision lithography equipment, OAI offers for MEMS, Microfluidics, and Nanotechnology a full line of front and backside mask aligners that have the highest specifications and are never obsolete due to their modular design, UV Light Sources, and Wafer Bonders with alignment bonding and plasma surface activation insitu. In addition, OAI has added a Nano Imprint Module that can fit onto any mask aligner. All equipment is used for R&D / light production.
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