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Alcatel Micro Machining Systems
67 Sharp Street
Higham, MA 02043 USA
phone: 1-781-331-4200
fax: 1-781-331-4230
www.adixen-usa.com

Booth 14

Alcatel Micro Machining Systems (AMMS) is a subsidiary of Alcatel Vacuum Technology France located in Annecy, France. AMMS is specialized in designing, manufacturing, marketing and servicing deep plasma etching systems for the fabrication of Micro Electro Mechanical Systems and 3D Semiconductors. Its main application markets are the telecommunications, automotive, aerospace, computer peripherals, biomedical industries, power devices and wafer level packaging. AMMS is committed to support its customers through an international network of sales and service offices. Four applications laboratories in France, USA, Taiwan and Japan provide its customers with process development and process demonstration. At the beginning of 2007, AMMS had a worldwide ICP etching tool installation base of more than 200 sites in the United States, Europe and Asia.

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