MEMS 2006 Istanbul

Xactix, Inc.
2403 Sidney Street, Suite 300
Pittsburgh, PA 15203 USA
Phone: 1-412-381-3195
Fax: 1-412-381-1136
Website: www.xactix.com

Booth 26

XACTIX is the leading supplier of xenon difluoride silicon etch equipment. Isotropic etching using xenon difluoride is being widely adopted as an essential process for releasing MEMS. XeF2 shows nearly infinite selectivity to silicon over almost all standard semiconductor materials including photoresist, silicon dioxide, silicon nitride and aluminum. Being a vapor phase etchant, XeF2 avoids many of the problems typically associated with wet or plasma etch processes.




	Invitation Letter - Current Support - Past Support - Exhibit Hall Floorplan - Exhibition Schedule - Contracts Xactix, Inc. 2403 Sidney Street, Suite 300 Pittsburgh, PA 15203 USA Phone: 1-412-381-3195 Fax: 1-412-381-1136 Website: www.xactix.com Booth 26 XACTIX is the leading supplier of xenon difluoride silicon etch equipment. Isotropic etching using xenon difluoride is being widely adopted as an essential process for releasing MEMS. XeF2 shows nearly infinite selectivity to silicon over almost all standard semiconductor materials including photoresist, silicon dioxide, silicon nitride and aluminum. Being a vapor phase etchant, XeF2 avoids many of the problems typically associated with wet or plasma etch processes.

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