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IEEE MEMS Conferences reflect from the rapid proliferation of the commitment and success of the Microsystems research community. In recent years, the IEEE MEMS Conference has attracted more than 700 participants, 800+ abstract submissions and has created the forum to present over 200 select papers in podium and poster/oral sessions. Its single-session format provides ample opportunity for interaction between attendees, presenters and exhibitors. The major areas of activity in the development of MEMS solicited and expected at this conference include but are not limited to:
  • Design, simulation and analysis tools with experimental verification
  • Fabrication technologies and processes
  • Silicon and non-silicon materials
  • Electro-mechanical integration techniques
  • Assembly and packaging approaches
  • Metrology and operational evaluation techniques
  • System architecture
The major areas of activity in the application of MEMS solicited and expected at this conference include but are not limited to:
  • Mechanical, thermal, and magnetic sensors and actuators, and system
  • Opto-mechanical microdevices and microsystems
  • Fluidic microcomponents and microsystems
  • Microdevices for data storage
  • Microdevices for biomedical engineering
  • Micro chemical analysis systems
  • Microdevices and systems for wireless communication
  • Microdevices for power supply and energy harvesting
  • Nano-electro-mechanical devices and systems
  • Scientific microinstruments


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